Sikorski Yuri, Rablau Corneliu, Dugan Mark, Said Ali A, Bado Philippe, Beholz Lars Guenter
Kettering University, Flint, Michigan 48504, USA.
Appl Opt. 2006 Oct 1;45(28):7519-23. doi: 10.1364/ao.45.007519.
We present a study of the sidewall surface quality inside microchannels fabricated in fused silica glass by femtosecond laser pulses and chemical etching. Multiple combinations of laser exposure and etching solution parameters were examined. Results of scanning electron microscopy, atomic force microscopy, and optical reflection analyses of the surfaces are presented. The results obtained demonstrate the feasibility of optical quality surface fabrication, which in turn demonstrates the feasibility of fabricating complex integrated devices containing microfluidic channels and optical waveguides in the glass substrates.
我们展示了一项关于通过飞秒激光脉冲和化学蚀刻在熔融石英玻璃中制造的微通道内的侧壁表面质量的研究。研究了激光曝光和蚀刻溶液参数的多种组合。给出了表面的扫描电子显微镜、原子力显微镜和光学反射分析结果。所获得的结果证明了光学质量表面制造的可行性，这反过来又证明了在玻璃基板中制造包含微流体通道和光波导的复杂集成器件的可行性。
