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采用相位调制干涉条纹细分技术的振动补偿干涉测量系统。

Vibration-compensated interferometry system using phase-modulating interference fringe subdivision technology.

作者信息

He Liangfang

机构信息

Department of Physics, Zhejiang University of Technology, China.

出版信息

Appl Opt. 2006 Nov 1;45(31):7987-92. doi: 10.1364/ao.45.007987.

DOI:10.1364/ao.45.007987
PMID:17068537
Abstract

An innovative vibration-compensation method, with phase-modulating interference fringe subdivision technology, is described. It simulates fringe movement by the phase difference of signals and can detect the fringe movement with an accuracy of 1/400 fringe spacing using this subdivision technology. A closed-loop vibration-compensation system is built, and the measurement of an interference fringe movement and a vibration-compensation test are successfully demonstrated. Because of this new method and a new feedback algorithm that was introduced, interference fringes can be stabilized at any preset phase position in real time. Compared with known methods, this method is simple and inexpensive, as well as effective.

摘要

描述了一种采用相位调制干涉条纹细分技术的创新型振动补偿方法。该方法通过信号的相位差模拟条纹移动,并利用此细分技术能够以1/400条纹间距的精度检测条纹移动。构建了一个闭环振动补偿系统,并成功演示了干涉条纹移动的测量和振动补偿测试。由于引入了这种新方法和新的反馈算法,干涉条纹能够实时稳定在任何预设的相位位置。与已知方法相比,该方法简单、成本低且有效。

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