Investigation of the scaling rules determining the performance of film bulk acoustic resonators operating as mass sensors.
作者信息
Weber Jan, Link Mathias, Primig Robert, Pitzer Dana, Wersing Wolfram, Schreiter Matthias
机构信息
Siemens AG, Corporate Technology, München, Germany.
出版信息
IEEE Trans Ultrason Ferroelectr Freq Control. 2007 Feb;54(2):405-12. doi: 10.1109/tuffc.2007.254.
PMID:17328337
Abstract
Solidly mounted (SMR-type) thin film bulk acoustic resonators operating at 2.2, 4.1, and 8.0 GHz and with lateral extents from 30 to 500 microm were fabricated and their performance as mass sensors was evaluated theoretically as well as experimentally. It was found that increasing the frequency leads to a principally improved performance of these devices. Problems arising for the horizontal as well as the vertical dimension and structure are investigated.
摘要
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