用于高效激光产生等离子体极紫外光源的液态锡微喷射靶的研制。

Development of a liquid tin microjet target for an efficient laser-produced plasma extreme ultraviolet source.

作者信息

Higashiguchi Takeshi, Hamada Masaya, Kubodera Shoichi

机构信息

Department of Electrical and Electronic Engineering and Photon Science Center, University of Miyazaki, Gakuen Kibanadai Nishi 1-1, Miyazaki 889-2192, Japan.

出版信息

Rev Sci Instrum. 2007 Mar;78(3):036106. doi: 10.1063/1.2712787.

DOI:10.1063/1.2712787

PMID:17411231

Abstract

A regenerative tin liquid microjet target was developed for a high average power extreme ultraviolet (EUV) source. The diameter of the target was smaller than 160 microm and good vacuum lower than 0.5 Pa was maintained during the operation. A maximum EUV conversion efficiency of 1.8% at the Nd:yttrium-aluminum-garnet laser intensity of around 2 x 10(11) Wcm(2) with a spot diameter of 175 microm (full width at half maximum) was observed. The angular distribution of the EUV emission remained almost isotropic, whereas suprathermal ions mainly emerged toward the target normal.

摘要

为高平均功率极紫外（EUV）源开发了一种再生锡液微喷射靶。靶的直径小于160微米，并且在运行期间保持低于0.5帕的良好真空度。在钕：钇铝石榴石激光强度约为2×10¹¹瓦/平方厘米、光斑直径为175微米（半高宽）的情况下，观察到最大EUV转换效率为1.8%。EUV发射的角分布几乎保持各向同性，而超热离子主要朝着靶法线方向出现。