用于激光等离子体极紫外光源的氙毛细管靶

Xe capillary target for laser-plasma extreme ultraviolet source.

作者信息

Inoue Takahiro, Okino Hideyasu, Nica Petru Edward, Amano Sho, Miyamoto Shuji, Mochizuki Takayasu

机构信息

Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori, Akou, Hyogo 678-1205, Japan.

出版信息

Rev Sci Instrum. 2007 Oct;78(10):105105. doi: 10.1063/1.2800768.

DOI:10.1063/1.2800768

PMID:17979456

Abstract

A cryogenic Xe jet system with an annular nozzle has been developed in order to continuously fast supply a Xe capillary target for generating a laser-plasma extreme ultraviolet (EUV) source. The cooling power of the system was evaluated to be 54 W, and the temperature stability was +/-0.5 K at a cooling temperature of about 180 K. We investigated experimentally the influence of pressure loss inside an annular nozzle on target formation by shortening the nozzle length. Spraying caused by cavitation was mostly suppressed by mitigating the pressure loss, and a focused jet was formed. Around a liquid-solid boundary, a solid-Xe capillary target (10070 microm phi) was formed with a velocity of < or =0.01 ms. Laser-plasma EUV generation was tested by focusing a Nd:YAG laser beam on the target. The results suggested that an even thinner-walled capillary target is required to realize the inertial confinement effect.

摘要

为了持续快速供应用于产生激光等离子体极紫外（EUV）源的氙毛细管靶，已开发出一种带有环形喷嘴的低温氙喷射系统。该系统的冷却功率经评估为54瓦，在约180 K的冷却温度下温度稳定性为±0.5 K。我们通过缩短喷嘴长度，对环形喷嘴内的压力损失对靶形成的影响进行了实验研究。通过减轻压力损失，由空化引起的喷雾大多得到抑制，并形成了聚焦射流。在液固边界周围，形成了速度≤0.01 m/s的固态氙毛细管靶（直径10070微米）。通过将钕：钇铝石榴石激光束聚焦在靶上对激光等离子体EUV产生进行了测试。结果表明，需要更薄壁的毛细管靶来实现惯性约束效应。