Venkatesh Srinivasan, Jiang Peng, Jiang Bin
Department of Chemical Engineering, University of Florida, Gainesville, FL 32611, USA.
Langmuir. 2007 Jul 17;23(15):8231-5. doi: 10.1021/la7006809. Epub 2007 Jun 16.
In this paper we report a generalized templating approach for fabricating wafer-scale, two-dimensional, non-close-packed (ncp) colloidal crystals. Polymer nanocomposites consisting of monolayer ncp colloidal crystals prepared by a spin-coating process are used as sacrificial templates. After removal of the colloidal silica templates, the voids in the polymer matrix are infiltrated with other materials. By plasma-etching the polymer matrix, wafer-scale ncp colloidal crystals from a variety of functional materials can be made. This technique is scalable and compatible with standard microfabrication. Two-component colloidal arrays with complex micropatterns can also be fabricated by combining microfabrication with this templating approach. Normal-incidence reflectivity spectra of replicated titania ncp arrays agree well with theoretical prediction using Scalar Wave Approximation.
在本文中，我们报道了一种用于制造晶圆级二维非密排（ncp）胶体晶体的通用模板法。由旋涂法制备的单层ncp胶体晶体组成的聚合物纳米复合材料用作牺牲模板。去除胶体二氧化硅模板后，聚合物基质中的空隙用其他材料填充。通过对聚合物基质进行等离子体蚀刻，可以制造出各种功能材料的晶圆级ncp胶体晶体。该技术具有可扩展性且与标准微加工兼容。通过将微加工与这种模板法相结合，还可以制造具有复杂微图案的双组分胶体阵列。复制的二氧化钛ncp阵列的正入射反射光谱与使用标量波近似的理论预测吻合良好。
