Yokoyama Hideaki, Dutriez Cedric, Li Lei, Nemoto Taichi, Sugiyama Kenji, Sasaki Sono, Masunaga Hiroyasu, Takata Masaki, Okuda Hiroshi
Nanotechnology Research Institute, National Institute of Advanced Industrial Science and Technology, 1-1-1 Higashi, Tsukuba, Ibaraki 305-0035, Japan.
J Chem Phys. 2007 Jul 7;127(1):014904. doi: 10.1063/1.2749724.
Analysis of nanostructures is of increasing importance with advances of nanotechnology. Embedded nanostructures in thin films in particular are of recent interest. Grazing incident small angle x-ray scattering (GISAXS) has been recognized to be a powerful method to probe such embedded nanostructures; however, quantitative analysis of scattering pattern is not always trivial due to complex refraction and reflection at surface and interfaces. We prepared nanocellular thin films using block copolymer template with carbon dioxide (CO(2)); CO(2) "bubbles" were formed in the CO(2)-philic block domains. Such nanocellular structures were analyzed by GISAXS and simulated using distorted wave Born approximation (DWBA). Unlike traditional transmission x-ray scattering, GISAXS requires a careful choice of incident angle to analyze the form factor of scatters embedded in a thin film. Nevertheless, the GISAXS measurements under optimized geometry with quantitative calculations using DWBA revealed that the nanocells are spherical and aligned in a single layer of hexagonal lattice and are surrounded by CO(2)-philic block domains.
随着纳米技术的发展，对纳米结构的分析变得越来越重要。特别是薄膜中的嵌入式纳米结构最近受到了关注。掠入射小角X射线散射（GISAXS）已被认为是探测此类嵌入式纳米结构的有力方法；然而，由于表面和界面处复杂的折射和反射，散射图案的定量分析并不总是容易的。我们使用二氧化碳（CO₂）的嵌段共聚物模板制备了纳米多孔薄膜；在亲CO₂嵌段域中形成了CO₂“气泡”。通过GISAXS对这种纳米多孔结构进行了分析，并使用扭曲波玻恩近似（DWBA）进行了模拟。与传统的透射X射线散射不同，GISAXS需要仔细选择入射角来分析嵌入薄膜中的散射体的形状因子。尽管如此，在优化几何条件下进行的GISAXS测量以及使用DWBA进行的定量计算表明，纳米孔是球形的，排列在单层六角晶格中，并被亲CO₂嵌段域包围。
