Haddad W S, McNulty I, Trebes J E, Anderson E H, Levesque R A, Yang L
Science. 1994 Nov 18;266(5188):1213-5. doi: 10.1126/science.266.5188.1213.
Ultrahigh-resolution three-dimensional images of a microscopic test object were made with soft x-rays collected with a scanning transmission x-ray microscope. The test object consisted of two different patterns of gold bars on silicon nitride windows that were separated by approximately 5 micrometers. Depth resolution comparable to the transverse resolution was achieved by recording nine two-dimensional images of the object at angles between -50 and +55 degrees with respect to the beam axis. The projections were then combined tomographically to form a three-dimensional image by means of an algorithm using an algebraic reconstruction technique. A transverse resolution of approximately 1000 angstroms was observed. Artifacts in the reconstruction limited the overall depth resolution to approximately 6000 angstroms; however, some features were clearly reconstructed with a depth resolution of approximately 1000 angstroms.
利用扫描透射X射线显微镜收集的软X射线，获得了微观测试物体的超高分辨率三维图像。测试物体由氮化硅窗口上两种不同图案的金条组成，它们之间的间距约为5微米。通过在相对于光束轴-50度至+55度的角度下记录物体的九张二维图像，实现了与横向分辨率相当的深度分辨率。然后，通过使用代数重建技术的算法对投影进行断层组合，以形成三维图像。观察到横向分辨率约为1000埃。重建中的伪像将整体深度分辨率限制在约6000埃；然而，一些特征以约1000埃的深度分辨率清晰地重建出来。
