Zhang Hao, Marma Mong S, Kim Eun Sok, McKenna Charles E, Thompson Mark E
IEEE Trans Ultrason Ferroelectr Freq Control. 2007 Sep;54(9):1723-5. doi: 10.1109/tuffc.2007.456.
This paper describes a film bulk acoustic resonator (FBAR) mass sensor for detecting Hg2+ ion in water with excellent sensitivity and selectivity. When a thin Au film was deposited on the surface of an FBAR, the resonant frequency shifted to a lower value when the film was exposed to Hg2+ in aqueous solution. The FBAR sensor detected as low as 10(-9) M Hg2+ (0.2 ppb Hg2+) in water. Other ions such as K+, Ca2+, Mg2+, Zn2+, and Ni2+ had little or no effect on the resonant frequency of the FBAR. Coating of the FBAR Au surface with a self-assembled monolayer (SAM) of 4-mercaptobenzoic acid decreased the Hg2+ response.
本文描述了一种用于检测水中Hg2+离子的薄膜体声波谐振器(FBAR)质量传感器,具有出色的灵敏度和选择性。当在FBAR表面沉积一层薄金膜时,将该膜暴露于水溶液中的Hg2+时,谐振频率会向较低值偏移。FBAR传感器能够检测到水中低至10(-9) M的Hg2+(0.2 ppb Hg2+)。其他离子如K+、Ca2+、Mg2+、Zn2+和Ni2+对FBAR的谐振频率几乎没有影响。用4-巯基苯甲酸的自组装单分子层(SAM)包覆FBAR金表面会降低Hg2+响应。