IEEE Trans Ultrason Ferroelectr Freq Control. 2011 Apr;58(4):685-8. doi: 10.1109/TUFFC.2011.1860.
The electro-mechanical coupling and resonance characteristics of a piezoelectric modulated thin film bulk acoustic wave resonator (PMBAR) is described quantitatively. The derived 1-D analytical model is in agreement with 2-D finite element modeling (FEM). The modeling shows that a pure shear mode excitation can be achieved and that coupling of parasitic Lamb waves is reduced in this design.
定量描述了一种压电调制薄膜体声波谐振器(PMBAR)的机电耦合和共振特性。所得到的一维解析模型与二维有限元建模(FEM)吻合。建模表明,这种设计可以实现纯剪切模式激励,并降低寄生兰姆波的耦合。