Hitchcock Adam P, Dynes James J, Johansson Göran, Wang Jian, Botton Gianluigi
Brockhouse Institute for Materials Research, McMaster University, Hamilton, ON, Canada L8S 4M1.
Micron. 2008;39(3):311-9. doi: 10.1016/j.micron.2007.09.008. Epub 2007 Oct 2.
In the last 20 years, synchrotron based soft X-ray microscopy has emerged as a powerful technique for chemical microanalysis. By efficiently measuring near-edge X-ray absorption spectroscopy (NEXAFS) at high spatial resolution, it produces information analogous to that delivered by electron energy loss spectroscopy in a transmission electron microscope (TEM-EELS). NEXAFS microscopy has significant advantages for studies of soft matter, which is typically a challenge for TEM-EELS due to radiation damage. It provides unique capabilities for studying wet samples. Here, we describe current state-of-the-art soft X-ray microscopy instrumentation and techniques (including the recently commissioned spectromicroscopy facility at the Canadian Light Source in Saskatoon), provide brief descriptions of a few recent applications, and make explicit comparisons of the strengths and limitations of NEXAFS microscopy - in particular, scanning transmission X-ray microscopy (STXM) - relative to TEM-EELS for spatially resolved materials analysis by inner shell spectroscopy.
在过去20年中，基于同步加速器的软X射线显微镜已成为一种强大的化学微分析技术。通过在高空间分辨率下有效测量近边X射线吸收光谱（NEXAFS），它产生的信息类似于透射电子显微镜（TEM-EELS）中的电子能量损失光谱所提供的信息。NEXAFS显微镜在软物质研究方面具有显著优势，由于辐射损伤，软物质通常是TEM-EELS面临的挑战。它为研究湿样品提供了独特的能力。在这里，我们描述了当前最先进的软X射线显微镜仪器和技术（包括最近在萨斯卡通的加拿大光源处启用的光谱显微镜设施），简要介绍了一些近期应用，并明确比较了NEXAFS显微镜——特别是扫描透射X射线显微镜（STXM）——相对于TEM-EELS在通过内壳层光谱进行空间分辨材料分析方面的优缺点。
