Tsai C W, Lee C H, Wang J
Opt Lett. 1999 Dec 1;24(23):1732-4. doi: 10.1364/ol.24.001732.
In profilometric measurements, by scanning the sample twice with a fixed vertical offset, one can separate the signal that comes from surface heterogeneity from the topographic signal. Using differential confocal microscopy, a newly developed open-loop nanometer profilometric technique, we demonstrated this dual-scan method on composite samples and obtained 10-nm depth resolution. This technique can also be applied to other profilometric techniques such as atomic force microscopy and scanning tunneling microscopy.
在轮廓测量中，通过以固定的垂直偏移对样品进行两次扫描，可以将来自表面不均匀性的信号与地形信号分离。使用一种新开发的开环纳米轮廓测量技术——差分共聚焦显微镜，我们在复合样品上展示了这种双扫描方法，并获得了10纳米的深度分辨率。该技术还可应用于其他轮廓测量技术，如原子力显微镜和扫描隧道显微镜。
