Lee Chau-Hwang, Mong Hong-Yao, Lin Wan-Chen
Opt Lett. 2002;27(20):1773-5. doi: 10.1364/ol.27.001773.
Applying the principle of differential confocal microscopy to wide-field optically sectioning microscopy, we develop a noninterferometric optical profilometer without scanning mechanisms. Depth resolution of 2 nm is achieved with a power-regulated tungsten-halogen lamp as the light source and a 14-bit CCD camera as the detector. The effects of inhomogeneous surface reflectivity are removed from topographic measurements by arithmetic division. The whole system can be constructed on a single silicon chip for use as a miniaturized optical profiler.
将差分共聚焦显微镜原理应用于宽视场光学切片显微镜，我们开发了一种无需扫描机制的非干涉光学轮廓仪。以功率调节的卤钨灯作为光源、14位CCD相机作为探测器，实现了2纳米的深度分辨率。通过算术除法从地形测量中消除了表面反射率不均匀的影响。整个系统可以构建在单个硅芯片上，用作小型化光学轮廓仪。
