Deck L L, de Groot P J
Opt Lett. 1998 Jan 1;23(1):19-21. doi: 10.1364/ol.23.000019.
We describe a method and algorithm for reducing the sensitivity of phase-shifting interferometry to external vibrations. Using an interline-transfer camera, a shutter, and a fast phase shifter, we acquire a series of paired interferograms in quadrature, with the pairs spaced to maximize residual phase-error cancellation. The rapid acquisition of quadrature pairs significantly improves resistance of interferometry to low-frequency vibrations.
我们描述了一种降低相移干涉测量法对外部振动敏感度的方法和算法。通过使用行间转移相机、快门和快速相移器，我们正交采集了一系列成对的干涉图，各对干涉图间隔排列以最大程度消除残余相位误差。正交对的快速采集显著提高了干涉测量法对低频振动的抗性。
