He S, Chen W, Tao X, Chen Z
Dept. of Electromech. Control and Autom., Harbin Inst. of Technol, China.
IEEE Trans Ultrason Ferroelectr Freq Control. 1998;45(5):1133-9. doi: 10.1109/58.726435.
A standing wave bi-directional linearly moving ultrasonic motor has been studied for the purpose of implementing a practical linear ultrasonic motor with simple structure, simple driving and high resolution. The fundamental principle of this linear motor is projections on the right sides of a standing wave crests generating thrust force right-diagonally on the slider pressed against the projections. Correspondingly, projections on the left sides of the wave crests make the slider move toward the left. In order to realize bi-directional actuating, vibration mode B3 or B4 is excited in a rectangular plate-type vibrator to make the projections on the right sides or the left sides of the wave crests. In this paper, the operation principle of the linear motor is demonstrated. Furthermore, a prototype linear ultrasonic motor of 40 mm in length, 10 mm in width is fabricated and investigated. The following performances have been achieved: maximum speed 200 mm/s, maximum force output 150 gf, and resolution less than 0.1 microm.
为了实现一种结构简单、驱动简便且分辨率高的实用型线性超声波电机，人们对驻波双向线性移动超声波电机进行了研究。该线性电机的基本原理是，驻波波峰右侧的凸起在压靠于凸起上的滑块上沿右对角线方向产生推力。相应地，波峰左侧的凸起使滑块向左移动。为了实现双向驱动，在矩形板式振动器中激发振动模式B3或B4，以使波峰右侧或左侧产生凸起。本文阐述了该线性电机的工作原理。此外，还制作并研究了一个长度为40毫米、宽度为10毫米的线性超声波电机原型。已实现以下性能：最大速度200毫米/秒、最大力输出150克力，分辨率小于0.1微米。
