Ruiz-Díez Víctor, Ababneh Abdallah, Seidel Helmut, Sánchez-Rojas José Luis
Microsystems, Actuators and Sensors Lab, Universidad de Castilla-La Mancha, E-13071 Ciudad Real, Spain.
Electronic Engineering Department, Hijjawi Faculty for Engineering Technology, Yarmouk University, Irbid 21163, Jordan.
Micromachines (Basel). 2022 Jul 28;13(8):1202. doi: 10.3390/mi13081202.
This paper reports the design, fabrication, and performance of a hybrid piezoelectric planar micro-conveyor based on Micro-Electromechanical Systems (MEMS) bridge resonators and featuring 3D-printed vertical legs. The device includes two cooperating silicon plate resonators with an area of 5 × 1 mm, actuated by an integrated aluminum-nitride (AlN) piezoelectric thin film. An optimally designed array of 3D-printed projection legs was attached to the plates, to convert the standing-wave (SW) vertical vibrations into horizontal rotations or translations of the supported slider. An open-loop control strategy based on burst-type driving signals, with different numbers of sinusoidal cycles applied on each of the resonators, allowed the cooperation of the two bridges to set up prescribed trajectories of small flat objects, up to 100 mg, with positional accuracy below 100 nm and speeds up to 20 mm/s, by differential drive actuation. The effect of the leg tip and sliders' surface finish on the conveyor performance was investigated, suggesting that further optimizations may be possible by modifying the tribological properties. Finally, the application of the micro-conveyor as a reconfigurable electronic system, driven by a preprogrammed sequence of signals, was demonstrated by delivering some surface-mount technology (SMD) parts lying on a 65 mg glass slider.
本文报道了一种基于微机电系统（MEMS）桥式谐振器并具有3D打印垂直支腿的混合压电平面微输送机的设计、制造及性能。该装置包括两个相互配合的面积为5×1 mm的硅板谐振器，由集成的氮化铝（AlN）压电薄膜驱动。将一组经过优化设计的3D打印突出支腿连接到板上，以将驻波（SW）垂直振动转换为支撑滑块的水平旋转或平移。基于突发型驱动信号的开环控制策略，在每个谐振器上施加不同数量的正弦周期，通过差动驱动致动，使两个桥协同工作，以设定小平面物体（最大100 mg）的规定轨迹，位置精度低于100 nm，速度高达20 mm/s。研究了支腿尖端和滑块表面光洁度对输送机性能的影响，表明通过改变摩擦学特性可能实现进一步优化。最后，通过输送位于65 mg玻璃滑块上的一些表面贴装技术（SMD）部件，展示了微输送机作为由预编程信号序列驱动的可重构电子系统的应用。
