Mauskopf P D, Bock J J, Del Castillo H, Holzapfel W L, Lange A E
California Institute of Technology, Mail Stop 59-33, Pasadena, California 91125, USA.
Appl Opt. 1997 Feb 1;36(4):765-71. doi: 10.1364/ao.36.000765.
We report the design and performance of 300-mK composite bolometers that use micromesh absorbers and support structures patterned from thin films of low-stress silicon nitride. The small geometrical filling factor of the micromesh absorber provides 20x reduction in heat capacity and cosmic ray cross section relative to a solid absorber with no loss in IR-absorption efficiency. The support structure is mechanically robust and has a thermal conductance, G < 2 x 10(-11) W/K, which is four times smaller than previously achieved at 300 mK. The temperature rise of the bolometer is measured with a neutron transmutation doped germanium thermistor attached to the absorbing mesh. The dispersion in electrical and thermal parameters of a sample of 12 bolometers optimized for the Sunyaev-Zel'dovich Infrared Experiment is +/-7% in R (T), +/-5% in optical efficiency, and +/-4% in G.
我们报告了使用微网吸收体和由低应力氮化硅薄膜制成的支撑结构的300 mK复合测辐射热计的设计与性能。相对于实心吸收体，微网吸收体较小的几何填充因子使热容量和宇宙射线横截面降低了20倍，而红外吸收效率没有损失。支撑结构机械强度高，热导率G < 2×10⁻¹¹ W/K，比之前在300 mK时实现的值小四倍。通过连接到吸收网的中子嬗变掺杂锗热敏电阻测量测辐射热计的温度上升。针对苏尼亚耶夫-泽尔多维奇红外实验优化的12个测辐射热计样本的电学和热学参数分散性为：R(T)的分散性为±7%，光学效率的分散性为±5%，G的分散性为±4%。
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