Institute of Engineering, Tokyo University of Agriculture and Technology, Koganei-shi 184-8588, Japan.
Institute of Industrial Science, University of Tokyo, Meguro-ku 153-8505, Japan.
Sensors (Basel). 2023 Jun 26;23(13):5938. doi: 10.3390/s23135938.
The doubly clamped microelectromechanical system (MEMS) beam resonators exhibit extremely high sensitivity to tiny changes in the resonance frequency owing to their high quality (Q-) factors, even at room temperature. Such a sensitive frequency-shift scheme is very attractive for fast and highly sensitive terahertz (THz) detection. The MEMS resonator absorbs THz radiation and induces a temperature rise, leading to a shift in its resonance frequency. This frequency shift is proportional to the amount of THz radiation absorbed by the resonator and can be detected and quantified, thereby allowing the THz radiation to be measured. In this review, we present an overview of the THz bolometer based on the doubly clamped MEMS beam resonators in the aspects of working principle, readout, detection speed, sensitivity, and attempts at improving the performance. This allows one to have a comprehensive view of such a novel THz detector.
双端固支微机电系统（MEMS）梁谐振器由于其高品质因数（Q 因子），即使在室温下，对谐振频率的微小变化也表现出极高的灵敏度。这种敏感的频率移动方案对于快速和高灵敏度太赫兹（THz）检测非常有吸引力。MEMS 谐振器吸收太赫兹辐射并引起温度升高，导致其谐振频率发生偏移。这种频率偏移与谐振器吸收的太赫兹辐射量成正比，可以进行检测和量化，从而实现对太赫兹辐射的测量。在本文中，我们从工作原理、读出、检测速度、灵敏度以及提高性能的尝试等方面，对基于双端固支 MEMS 梁谐振器的太赫兹测辐射热计进行了综述。这使得人们可以全面了解这种新型太赫兹探测器。
