High-wavelength-resolution extreme-ultraviolet multilayer mirror.

Multilayer mirrors with a system wavelength resolution (lambda/Dlambda) as high as 30-50 are required for the diagnostics of cosmic plasmas with temperatures of 1-20 MK. Such a high wavelength resolution can be realized by increasing the number of layer pairs contributing to the reflectance, by selecting less-absorbing materials for both the reflector and the spacer, and by decreasing the thickness of the reflector. We have fabricated a multilayer mirror tuned to 284 A with a silicon carbide reflector (20% thickness of the layer period) and an aluminum spacer and achieved lambda/Dlambda ~26.8 with a peak reflectivity of ~13.0%. This wavelength resolution is close to the value obtained with a numerical simulation and is considerably higher than the value obtained with the conventional Mo/Si multilayer.