Medvedev V V, van den Boogaard A J R, van der Meer R, Yakshin A E, Louis E, Krivtsun V M, Bijkerk F
FOM Institute DIFFER – Dutch Institute for Fundamental Energy Research, PO Box 1207, 3430 BE Nieuwegein, The Netherlands.
Opt Express. 2013 Jul 15;21(14):16964-74. doi: 10.1364/OE.21.016964.
We report on the development of a hybrid mirror realized by integrating an EUV-reflecting multilayer coating with a lamellar grating substrate. This hybrid mirror acts as an efficient Bragg reflector for extreme ultraviolet (EUV) radiation at a given wavelength while simultaneously providing spectral-selective suppression of the specular reflectance for unwanted longer-wavelength radiation due to the grating phase-shift resonance. The test structures, designed to suppress infrared (IR) radiation, were fabricated by masked deposition of a Si grating substrate followed by coating of the grating with a Mo/Si multilayer. To give the proof of principle, we developed such a hybrid mirror for the specific case of reflecting 13.5 nm radiation while suppressing 10 μm light, resulting in 61% reflectance at the wavelength of 13.5 nm together with the 70 × suppression rate of the specular reflection at the wavelength of 10 μm, but the considered filtering principle can be used for a variety of applications that are based on utilization of broadband radiation sources.
我们报告了一种混合镜的研制情况，该混合镜通过将极紫外（EUV）反射多层膜与层状光栅基板集成而实现。这种混合镜在给定波长下作为极紫外（EUV）辐射的高效布拉格反射器，同时由于光栅相移共振，对不需要的长波长辐射的镜面反射率提供光谱选择性抑制。为抑制红外（IR）辐射而设计的测试结构，是通过对硅光栅基板进行掩膜沉积，然后在光栅上涂覆钼/硅多层膜制成的。为了验证原理，我们针对反射13.5nm辐射同时抑制10μm光的特定情况研制了这样一种混合镜，在13.5nm波长处的反射率为61%，同时在10μm波长处镜面反射的抑制率为70倍，但所考虑的滤波原理可用于基于宽带辐射源利用的各种应用。
