Bowen J P, Michaels R L, Blough C G
Appl Opt. 1997 Dec 1;36(34):8970-5. doi: 10.1364/ao.36.008970.
We describe the design and construction of a high-precision laser writing machine for the direct generation of large-diameter rotationally symmetric diffractive optics with continuous profiles in photoresist. The photoresist profile can be used as a replication master surface or etched into a silica substrate. Machine design methodology, as well as qualification of performance, is provided. Test results for an f/2 100-mm clear-aperture diffractive lens directly etched into a silica substrate are presented. Diffraction efficiency as a function of zone spacing and wave-front performance are given.
我们描述了一种高精度激光写入机的设计与构造，该机器用于在光刻胶中直接生成具有连续轮廓的大直径旋转对称衍射光学元件。光刻胶轮廓可用作复制母版表面或蚀刻到二氧化硅衬底中。文中提供了机器设计方法以及性能鉴定。还给出了直接蚀刻到二氧化硅衬底中的f/2 100毫米孔径衍射透镜的测试结果。给出了衍射效率与区域间距的函数关系以及波前性能。
