Shimansky Ruslan V, Belousov Dmitrij A, Korolkov Victor P, Kuts Roman I
Institute of Automation and Electrometry SB RAS, 630090 Novosibirsk, Russia.
Sensors (Basel). 2021 Oct 6;21(19):6635. doi: 10.3390/s21196635.
The research and development of methods using of the specialized diffractive microstructure sensors embedded in the pattern of computer-generated holograms (CGH) manufactured on circular and X-Y laser writing systems is discussed. These microstructures consist of two parts: one of which is written before the CGH in the field of future hologram and the second one is written during the long-term writing of the CGH. The shift between the first and second part of the microstructure is the trace of the writing errors and allows one to determine and calculate the error of CGH fabrication along both orthogonal coordinates. The developed method is based on the principle of diffraction-based overlay with 1D and 2D built-in diffractive microstructure-sensors. Mathematical modeling and results of experimental test writings of such diffractive microstructure sensors are described. The efficiency of using these types of build-in sensors for the writing errors estimation for CGHs is demonstrated.
本文讨论了在圆形和X-Y激光写入系统上制造的计算机生成全息图（CGH）图案中嵌入专用衍射微结构传感器的方法的研发。这些微结构由两部分组成：一部分在CGH之前写入未来全息图的区域，另一部分在CGH的长期写入过程中写入。微结构第一部分和第二部分之间的偏移是写入误差的痕迹，可用于确定和计算CGH沿两个正交坐标的制造误差。所开发的方法基于具有一维和二维内置衍射微结构传感器的基于衍射的叠加原理。描述了此类衍射微结构传感器的数学建模和实验测试写入结果。展示了使用这些类型的内置传感器估计CGH写入误差的效率。
