使用声表面波延迟线精确测量声表面波速度。
Precise measurement of SAW velocity using SAW delay line.
作者信息
Nomura T, Yasuda T, Shiokawa S, Moriizumi T
机构信息
Dept. of Electr. Commun., Shibaura Inst. of Technol., Tokyo.
出版信息
IEEE Trans Ultrason Ferroelectr Freq Control. 1988;35(6):646-51. doi: 10.1109/58.9319.
A method of nondestructive evaluation (NDE) by measuring the acoustic properties of materials using a surface-acoustic-wave (SAW) delay line is presented. A SAW delay line with three interdigital transducers (IDTs) deposited on a piezoelectric substrate is used to measure the SAW velocity of the sample material, using a fluid couplant. The SAW velocity is obtained from the frequency dependence of the delay line, and movement in the z-direction is not required. Measurements have been made for an anisotropic material at frequencies from 35 to 55 MHz. The experimental results agree well with the theoretical results. Moreover, it has been found that the focused SAW excited from a Fresnel-phase-plate IDT is suitable for mapping the two-dimensional variation of SAW velocity on an anisotropic sample surface.
提出了一种通过使用表面声波（SAW）延迟线测量材料声学特性来进行无损评估（NDE）的方法。一种在压电基片上沉积有三个叉指换能器（IDT）的SAW延迟线，利用流体耦合剂来测量样品材料的SAW速度。SAW速度由延迟线的频率依赖性获得，并且不需要在z方向上移动。已对一种各向异性材料在35至55MHz频率范围内进行了测量。实验结果与理论结果吻合良好。此外，还发现从菲涅耳相位板IDT激发的聚焦SAW适用于绘制各向异性样品表面上SAW速度的二维变化情况。
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