Wu C M, Deslattes R D
Appl Opt. 1998 Oct 1;37(28):6696-700. doi: 10.1364/ao.37.006696.
The periodic nonlinearity that arises from nonideal laser sources and imperfections of optical components limits the accuracy of displacement measurements in heterodyne interferometry at the nanometer level. An analytical approach to investigating the nonlinearity is presented. Frequency mixing, polarization mixing, polarization-frequency mixing, and ghost reflections are all included in this investigation. A general form for the measurement signal, including that of the distortions, is given. The analytical approach is also applicable to homodyne interferometry.
非理想激光源和光学元件的缺陷所产生的周期性非线性限制了纳米级外差干涉测量中位移测量的精度。本文提出了一种研究非线性的分析方法。该研究涵盖了频率混合、偏振混合、偏振-频率混合和重影反射。给出了测量信号的一般形式，包括失真信号的形式。该分析方法也适用于零差干涉测量。
