用于专用扫描透射电子显微镜的高速电子能量损失谱映射系统的开发与特性
The development and characteristics of a high-speed EELS mapping system for a dedicated STEM.
作者信息
Isakozawa Shigeto, Kaji Kazutoshi, Jarausch Konrad, Terada Shohei, Baba Norio
机构信息
Hitachi High-Technologies Corp., 882 Ichige, Hitachinaka, Ibaraki 312-8504, Japan.
出版信息
J Electron Microsc (Tokyo). 2008 Apr;57(2):41-5. doi: 10.1093/jmicro/dfn001.
A new EELS (electron energy loss spectroscopy) real-time elemental mapping system has been developed for a dedicated scanning transmission electron microscope (STEM). The previous two-window-based jump-ratio system has been improved by a three-window-based system. It is shown here that the three-window imaging method has less artificial intensity in elemental maps than the two-window-based method. Using the new three-window system, the dependence of spatial resolution on the energy window width was studied experimentally and also compared with TEM-based EELS. Here it is shown experimentally that the spatial resolution of STEM-based EELS is independent of the energy window width in a range from 10 eV to 60 eV.
一种用于专用扫描透射电子显微镜（STEM）的新型电子能量损失谱（EELS）实时元素映射系统已被开发出来。基于两个窗口的跳变比系统已被基于三个窗口的系统改进。结果表明，与基于两个窗口的方法相比，三个窗口成像方法在元素映射中的人为强度更小。使用新的三个窗口系统，通过实验研究了空间分辨率对能量窗口宽度的依赖性，并与基于透射电子显微镜（TEM）的EELS进行了比较。实验表明，基于STEM的EELS的空间分辨率在10 eV至60 eV范围内与能量窗口宽度无关。
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