Isakozawa Shigeto, Kaji Kazutoshi, Jarausch Konrad, Terada Shohei, Baba Norio
Hitachi High-Technologies Corp., 882 Ichige, Hitachinaka, Ibaraki 312-8504, Japan.
J Electron Microsc (Tokyo). 2008 Apr;57(2):41-5. doi: 10.1093/jmicro/dfn001.
A new EELS (electron energy loss spectroscopy) real-time elemental mapping system has been developed for a dedicated scanning transmission electron microscope (STEM). The previous two-window-based jump-ratio system has been improved by a three-window-based system. It is shown here that the three-window imaging method has less artificial intensity in elemental maps than the two-window-based method. Using the new three-window system, the dependence of spatial resolution on the energy window width was studied experimentally and also compared with TEM-based EELS. Here it is shown experimentally that the spatial resolution of STEM-based EELS is independent of the energy window width in a range from 10 eV to 60 eV.
一种用于专用扫描透射电子显微镜（STEM）的新型电子能量损失谱（EELS）实时元素映射系统已被开发出来。基于两个窗口的跳变比系统已被基于三个窗口的系统改进。结果表明，与基于两个窗口的方法相比，三个窗口成像方法在元素映射中的人为强度更小。使用新的三个窗口系统，通过实验研究了空间分辨率对能量窗口宽度的依赖性，并与基于透射电子显微镜（TEM）的EELS进行了比较。实验表明，基于STEM的EELS的空间分辨率在10 eV至60 eV范围内与能量窗口宽度无关。
