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用于软X射线平场光谱仪的机械刻划与全息变线间距光栅的比较。

Comparison of mechanically ruled versus holographically varied line-spacing gratings for a soft-x-ray flat-field spectrograph.

作者信息

Yamazaki T, Gullikson E, Miyata N, Koike M, Harada Y, Mrowka S, Kleineberg U, Underwood J H, Yanagihara M M, Sano K

机构信息

Advanced Photon Research Center, Kansai Research Establishment, Japan Atomic Energy Research Institute, 25-1 Miiminami-machi, Neyagawa, 572-0019 Osaka, Japan.

出版信息

Appl Opt. 1999 Jul 1;38(19):4001-3. doi: 10.1364/ao.38.004001.

DOI:10.1364/ao.38.004001
PMID:18323875
Abstract

Recent progress in the design of aspheric wave-front recording systems has permitted the manufacture of holographic gratings with highly variable groove densities that are suitable for flat-field spectrographs. A holographic grating thus recorded was processed to produce a laminar profile by use of reactive-ion etching. Measurements are reported of the absolute diffraction efficiency of this grating and of a comparable mechanically ruled grating. It is found that the holographic grating is much more effective in suppressing the higher orders. The spectral resolution was determined by use of a carbon Kalpha x-ray generator and a spectrograph with an imaging detector. The spectral resolution of the holographic grating was approximately 3 times worse than that of the ruled grating.

摘要

非球面波前记录系统设计方面的最新进展使得能够制造出具有高度可变槽密度的全息光栅,这些光栅适用于平场光谱仪。通过反应离子蚀刻对这样记录的全息光栅进行处理以产生层状轮廓。报告了该光栅以及一个可比的机械刻划光栅的绝对衍射效率的测量结果。发现全息光栅在抑制高阶衍射方面要有效得多。使用碳KαX射线发生器和带有成像探测器的光谱仪确定了光谱分辨率。全息光栅的光谱分辨率比刻划光栅的光谱分辨率大约差3倍。

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引用本文的文献

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Soft X-ray varied-line-spacing gratings fabricated by near-field holography using an electron beam lithography-written phase mask.利用电子束光刻写入的相位掩模通过近场全息术制造的软X射线变线间距光栅。
J Synchrotron Radiat. 2019 Sep 1;26(Pt 5):1782-1789. doi: 10.1107/S1600577519008245. Epub 2019 Aug 16.