Kim J K, Kim M S, Bae J H, Kwon J H, Lee H B, Jeong S H
Department of Physics, Yeungnam University, Gyongsan 712-749, Korea.
Appl Opt. 2000 Jun 1;39(16):2584-91. doi: 10.1364/ao.39.002584.
A system for measuring the gap in a proximity exposure tool of a plasma display panel (PDP) is developed that uses single or dual position-sensitive detectors (PSD's). The resolution of the gap distance is 0.5 mum, with a capture range of 500 mum. Signal processing is simple and fast and easy because analogous PSD's are used as the position sensors. One PSD is used to detect the position of the reference beam, which is reflected from the upper surface of the gap; the other PSD is used to detect the position of the signal beam, which is reflected from the lower surface of the gap. A charge-coupled-device sensor is also employed to monitor the reflected beams and the region of measurement. In the gap-measurement system that uses a single PSD, first the reference beam is incident upon the PSD and then the signal beam is incident upon the same PSD. Then the separation between the two beams is calculated from the position of the reference beam and from the average beam position.
开发了一种用于测量等离子体显示面板（PDP）接近曝光工具中间隙的系统，该系统使用单或双位置敏感探测器（PSD）。间隙距离的分辨率为0.5μm，捕获范围为500μm。由于使用模拟PSD作为位置传感器，信号处理简单、快速且容易。一个PSD用于检测从间隙上表面反射的参考光束的位置；另一个PSD用于检测从间隙下表面反射的信号光束的位置。还采用电荷耦合器件传感器来监测反射光束和测量区域。在使用单个PSD的间隙测量系统中，首先参考光束入射到PSD上，然后信号光束入射到同一个PSD上。然后根据参考光束的位置和平均光束位置计算两束光之间的间距。
