Borgia Cesare, Olliges Sven, Spolenak Ralph
Laboratory for Nanometallurgy, Department of Materials, ETH Zurich, Wolfgang-Pauli-Str. 10, CH-8093 Zurich, Switzerland.
Rev Sci Instrum. 2008 Apr;79(4):043904. doi: 10.1063/1.2907534.
Phase analysis of highly out-of-plane textured specimens using x-ray diffraction is usually complicated due to the disappearance of most of the x-ray peaks in a common theta/2 theta diffraction geometry. In this paper, we propose a technique, where powderlike spectra of textured samples are obtained by multiaxial x-ray diffraction scans. This technique is a simple, yet powerful method which allows for significant improvement in thin film characterization and provides several types of information about the samples, such as the rapid qualitative identification of phases using common powder x-ray diffraction spectra databases, texture distribution, and quantitative residual stress analysis.
由于在常见的θ/2θ衍射几何结构中大多数X射线峰消失，使用X射线衍射对高度面外织构化样品进行相分析通常很复杂。在本文中，我们提出了一种技术，通过多轴X射线衍射扫描获得织构化样品的粉末状光谱。该技术是一种简单而强大的方法，可显著改善薄膜表征，并提供有关样品的几种信息，例如使用常见粉末X射线衍射光谱数据库进行相的快速定性识别、织构分布和定量残余应力分析。
