Fei W D, Liu C Q, Ding M H, Li W L, Wang L D
School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, People's Republic of China.
Rev Sci Instrum. 2009 Sep;80(9):093903. doi: 10.1063/1.3227212.
On the basis of omega-scan x-ray diffraction (XRD), quantitative and qualitative characterization methods for fiber texture are proposed. The physical meaning of omega-scan curve is discussed in detail, and it is shown that the relative intensity curve of omega-scan XRD for a certain crystal plane is proportional to the pole density of the plane. Then qualitative and quantitative characterization methods for fiber texture are proposed from the concept of pole density. The proposed methods can be used in any crystal system. As an example for experimental verification, an orientation distribution function (ODF) experiment and a series of omega-scan XRD experiments are performed on a sputtered platinum film. From the comparison between the result of the ODF experiment and that of the analyses on the omega-scan XRD experiments, it is proved that the proposed qualitative and quantitative methods are effective and simple.
基于ω扫描X射线衍射（XRD），提出了纤维织构的定量和定性表征方法。详细讨论了ω扫描曲线的物理意义，结果表明，某一晶面的ω扫描XRD相对强度曲线与该晶面的极密度成正比。然后从极密度的概念出发，提出了纤维织构的定性和定量表征方法。所提出的方法可用于任何晶体系统。作为实验验证的一个例子，对溅射铂薄膜进行了取向分布函数（ODF）实验和一系列ω扫描XRD实验。通过ODF实验结果与ω扫描XRD实验分析结果的比较，证明了所提出的定性和定量方法有效且简单。
