Sun Yu, Nelson Bradley J
Advanced Micro and Nanosystems Laboratory, University of Toronto, 5 King's College Road, Toronto M5S 3G8, Canada.
Biomed Mater. 2007 Mar;2(1):S16-22. doi: 10.1088/1748-6041/2/1/S03. Epub 2007 Mar 2.
Microelectromechanical systems (MEMS) are playing increasingly important roles in facilitating biological studies. They are capable of providing not only qualitative but also quantitative information on the cellular, sub-cellular and organism levels, which is instrumental to understanding the fundamental elements of biological systems. MEMS force sensors with their high bandwidth and high sensitivity combined with their small size, in particular, have found a role in this domain, because of the importance of quantifying forces and their effect on the function and morphology of many biological structures. This paper describes our research in the development of MEMS capacitive force sensors that have already demonstrated their effectiveness in the areas of cell mechanics and Drosophila flight dynamics studies.
微机电系统（MEMS）在促进生物学研究方面发挥着越来越重要的作用。它们不仅能够在细胞、亚细胞和生物体水平上提供定性信息，还能提供定量信息，这有助于理解生物系统的基本要素。特别是，MEMS力传感器具有高带宽、高灵敏度以及小尺寸的特点，由于量化力及其对许多生物结构的功能和形态的影响非常重要，因此在这一领域发挥了作用。本文描述了我们在开发MEMS电容式力传感器方面的研究，该传感器已在细胞力学和果蝇飞行动力学研究领域证明了其有效性。
