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使用石英晶体原子力显微镜反馈的扫描霍尔探针显微镜(SHPM)。

Scanning hall probe microscopy (SHPM) using quartz crystal AFM feedback.

作者信息

Dede M, Urkmen K, Girişen O, Atabak M, Oral A, Farrer I, Ritchie D

机构信息

Department of Physics, Bilkent University, 06800 Ankara, Turkey.

出版信息

J Nanosci Nanotechnol. 2008 Feb;8(2):619-22. doi: 10.1166/jnn.2008.a265.

Abstract

Scanning Hall Probe Microscopy (SHPM) is a quantitative and non-invasive technique for imaging localized surface magnetic field fluctuations such as ferromagnetic domains with high spatial and magnetic field resolution of approximately 50 nm and 7 mG/Hz(1/2) at room temperature. In the SHPM technique, scanning tunneling microscope (STM) or atomic force microscope (AFM) feedback is used to keep the Hall sensor in close proximity of the sample surface. However, STM tracking SHPM requires conductive samples; therefore the insulating substrates have to be coated with a thin layer of gold. This constraint can be eliminated with the AFM feedback using sophisticated Hall probes that are integrated with AFM cantilevers. However it is very difficult to micro fabricate these sensors. In this work, we have eliminated the difficulty in the cantilever-Hall probe integration process, just by gluing a Hall Probe chip to a quartz crystal tuning fork force sensor. The Hall sensor chip is simply glued at the end of a 32.768 kHz or 100 kHz Quartz crystal, which is used as force sensor. An LT-SHPM system is used to scan the samples. The sensor assembly is dithered at the resonance frequency using a digital Phase Locked Loop circuit and frequency shifts are used for AFM tracking. SHPM electronics is modified to detect AFM topography and the frequency shift, along with the magnetic field image. Magnetic domains and topography of an Iron Garnet thin film crystal, NdFeB demagnetised magnet and hard disk samples are presented at room temperature. The performance is found to be comparable with the SHPM using STM feedback.

摘要

扫描霍尔探针显微镜(SHPM)是一种定量且非侵入性的技术,用于对局部表面磁场波动进行成像,例如在室温下以约50纳米的高空间分辨率和7毫高斯/赫兹(1/2)的磁场分辨率成像铁磁畴。在SHPM技术中,使用扫描隧道显微镜(STM)或原子力显微镜(AFM)反馈来使霍尔传感器保持在靠近样品表面的位置。然而,STM跟踪SHPM需要导电样品;因此,绝缘基板必须涂上一层薄金。使用与AFM悬臂集成的精密霍尔探针通过AFM反馈可以消除这一限制。然而,微制造这些传感器非常困难。在这项工作中,我们通过将霍尔探针芯片粘贴到石英晶体音叉力传感器上,消除了悬臂 - 霍尔探针集成过程中的困难。霍尔传感器芯片简单地粘贴在用作力传感器的32.768千赫兹或100千赫兹石英晶体的末端。使用LT - SHPM系统扫描样品。使用数字锁相环电路在共振频率下对传感器组件进行抖动,并将频率偏移用于AFM跟踪。对SHPM电子设备进行了修改,以检测AFM形貌和频率偏移以及磁场图像。展示了室温下铁石榴石薄膜晶体、退磁的钕铁硼磁体和硬盘样品的磁畴和形貌。发现其性能与使用STM反馈的SHPM相当。

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