INESC-Microsistemas e Nanotecnologias (INESC-MN), 1000-029 Lisboa, Portugal.
Physics Department, Instituto Superior Tecnico, Universidade de Lisboa, 1049-001 Lisboa, Portugal.
Sensors (Basel). 2018 Jun 27;18(7):2049. doi: 10.3390/s18072049.
The present work provides a detailed description on quantitative 3D magnetic field reconstruction using a scanning magnetoresistance microscopy setup incorporating a 19.5 μm × 2.5 μm magnetoresistive sensor. Therefore, making use of a rotation stage, 11 nm thick ferromagnetic CoFe elements with 20 μm × 5 μm planar size were measured along different sensor axes and converted into cartesian coordinate magnetic field components by use of the analytical coordinate transform equations. The reconstruction steps were followed and validated by numerical simulations based on a field averaging model caused by a non-negligible sensor volume. Detailed in-plane magnetic component reconstruction with ability to reconstruct sub-micrometer features is achieved. A discussion on the limiting factors for optimal resolution is presented.
本工作详细描述了使用扫描磁阻显微镜设置，结合 19.5μm×2.5μm 磁阻传感器进行定量 3D 磁场重建。因此，通过旋转台，沿着不同的传感器轴测量了 11nm 厚的铁磁 CoFe 元件，其平面尺寸为 20μm×5μm，并通过使用解析坐标变换方程将其转换为笛卡尔坐标磁场分量。通过基于由不可忽略的传感器体积引起的场平均模型的数值模拟来遵循和验证重建步骤。实现了具有重建亚微米特征能力的详细面内磁分量重建。讨论了最佳分辨率的限制因素。
