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通过化学气相沉积法制备的柱状二氧化铈纳米结构的气敏特性

Gas sensing properties of columnar CeO2 nanostructures prepared by chemical vapor deposition.

作者信息

Barreca Davide, Comini Elisabetta, Gasparotto Alberto, Mccato Chiara, Maragno Cinzia, Sberveglieri Giorgio, Tondello Eugenio

机构信息

ISTM-CNR and INSTM, Department of Chemistry, Padova University, Via Marzolo 1, 35131 Padova, Italy.

出版信息

J Nanosci Nanotechnol. 2008 Feb;8(2):1012-6. doi: 10.1166/jnn.2008.080.

Abstract

Columnar CeO2 nanostructures are grown on alumina substrates by a template- and catalyst-free Chemical Vapor Deposition (CVD) approach and subsequently tested as resistive gas sensors of CH3COCH3, H2, NO2. The sensor response is stable and reproducible throughout the whole working temperature range (200-500 degrees C) and directly dependent on the analyte gas and the adopted operating conditions. The higher sensitivity with respect to that displayed by continuous CeO2 thin films demonstrates the potential of fabricating nanostructured sensing devices characterized by improved functional performances.

摘要

通过无模板和无催化剂的化学气相沉积(CVD)方法在氧化铝衬底上生长柱状CeO₂纳米结构,随后将其作为CH₃COCH₃、H₂、NO₂的电阻式气体传感器进行测试。在整个工作温度范围(200 - 500摄氏度)内,传感器响应稳定且可重复,并且直接取决于分析气体和所采用的操作条件。相对于连续CeO₂薄膜所表现出的更高灵敏度证明了制造具有改进功能性能的纳米结构传感装置的潜力。

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