Characterization of magnetic materials using a scanning microwave microprobe.

We investigated the electromagnetic properties of metals of iron, nickel, cobalt, aluminum, gold, copper, silver, and permalloy thin films on SiO2 substrates using a near-field microwave microprobe. The electromagnetic properties of metal sheets were estimated by measuring the microwave reflection coefficient S(11) and compared with the theoretical values. We observed the hysteresis behavior of permalloy thin films on SiO2 substrates using a near-field scanning microwave microprobes (NSMM) system. Experimental results are in good agreement with the theoretical model of transmission theory. In order to better characterize the electromagnetic properties of metals and magnetic metals instead of the usual method, we take advantage of the noncontact microprobing evaluation capabilities using a near-field microwave.