Quantitative measurement of piezoelectric coefficient of thin film using a scanning evanescent microwave microscope.

作者信息

Zhao Zhenli, Luo Zhenlin, Liu Chihui, Wu Wenbin, Gao Chen, Lu Yalin

机构信息

National Synchrotron Radiation Laboratory and Hefei National Laboratory for Physical Sciences at Microscale, University of Science and Technology of China, Hefei, Anhui, PR China.

出版信息

Rev Sci Instrum. 2008 Jun;79(6):064704. doi: 10.1063/1.2940275.

DOI:10.1063/1.2940275

PMID:18601426

Abstract

This article describes a new approach to quantitatively measure the piezoelectric coefficients of thin films at the microscopic level using a scanning evanescent microwave microscope. This technique can resolve 10 pm deformation caused by the piezoelectric effect and has the advantages of high scanning speed, large scanning area, submicron spatial resolution, and a simultaneous accessibility to many other related properties. Results from the test measurements on the longitudinal piezoelectric coefficient of PZT thin film agree well with those from other techniques listed in literatures.

摘要