高精度石英晶体薄膜监测仪。
High accuracy quartz crystal thin film monitor.
作者信息
Ramadan B, Piyakis K, Kos J F
机构信息
Department of Physics and Astronomy, Universtiy of Regina, Regina, Saskatchewan, Canada.
出版信息
Rev Sci Instrum. 1979 Jul;50(7):867-71. doi: 10.1063/1.1135941.
PMID:18699622
Abstract
A quartz resonator thin film monitor of exceptionally high accuracy and resolution has been developed. It is capable of providing measurements with an effective resolution of 0.001 nm and a corresponding relative accuracy of about 1% for a 0.100-nm-thick film of gold. A novel dual oscillator and mixer using integrated circuits is also described.
摘要
已开发出一种具有极高精度和分辨率的石英谐振器薄膜监测器。对于0.100纳米厚的金薄膜，它能够提供有效分辨率为0.001纳米且相应相对精度约为1%的测量结果。还介绍了一种使用集成电路的新型双振荡器和混频器。
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