Matusiak Adrian, Żak Andrzej Marek
Faculty of Mechanical Engineering, Wroclaw University of Science and Technology, 50-371 Wroclaw, Poland.
Nanores Sp. z o. o. Sp. k., 51-317 Wroclaw, Poland.
Sensors (Basel). 2022 Aug 25;22(17):6422. doi: 10.3390/s22176422.
The layer thickness measurement process is an indispensable companion of vacuum sputtering and evaporation. Thus, quartz crystal microbalance is a well-known and reliable method for monitoring film thickness. However, most commercial devices use very simple signal processing methods, offering only a readout of the frequency change value and an approximate sputtering rate. Here, we show our concept of instrument, to better control the process parameters and for easy replication. The project uses open-source data and its own ideas, fulfilling all the requirements of a measuring system and contributing to the open-source movement due to the added value and the replacement of obsolete technologies with contemporary ones. The device provides an easy way to expand existing sputtering machines with a proper controller based on our work. The device described in the paper can be easily used in need, being a proven project of a fast, inexpensive, and reliable thin-film thickness monitor.
层厚测量过程是真空溅射和蒸发过程中不可或缺的环节。因此，石英晶体微天平是一种广为人知且可靠的监测膜厚的方法。然而，大多数商业设备采用非常简单的信号处理方法，仅提供频率变化值的读数和近似的溅射速率。在此，我们展示了我们的仪器概念，以便更好地控制工艺参数并便于复制。该项目使用开源数据并融入自身想法，满足测量系统的所有要求，并因其附加值以及用当代技术取代过时技术而对开源运动有所贡献。该设备提供了一种基于我们的工作用合适的控制器轻松扩展现有溅射设备的方法。本文所述的设备在有需要时可轻松使用，是一个经过验证的快速、廉价且可靠的薄膜厚度监测项目。
