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用于有机单层亚100纳米图案化的催化印章光刻技术。

Catalytic stamp lithography for sub-100 nm patterning of organic monolayers.

作者信息

Mizuno Hidenori, Buriak Jillian M

机构信息

Department of Chemistry, University of Alberta, and the National Institute for Nanotechnology (NINT), Edmonton, Alberta, Canada.

出版信息

J Am Chem Soc. 2008 Dec 31;130(52):17656-7. doi: 10.1021/ja807708r.

DOI:10.1021/ja807708r
PMID:19063631
Abstract

A stamp-based nanoscale patterning technique of organic monolayers, termed catalytic stamp lithography, is described. The surface of poly(dimethylsiloxane) was patterned with catalytic Pd nanoparticles (NPs) via the use of self-assembled block copolymers. Using this catalytic stamp, catalytic hydrosilylations of terminal alkenes/alkynes were performed on H-terminated Si(111) or Si(100) surfaces to create nanoscale patterns of organic monolayers. Since the reaction takes place exclusively underneath the patterned Pd NPs (localized catalysis), the pattern formation is less susceptible to ink diffusion and stamp deformation, even at this sub-100 nm scale. A range of different molecular inks can be utilized to produce monolayer patterns of different chemical functionalities, and the stamps can be reused multiple times. The potential utility of this kind of chemically patterned surfaces as the basis for more complicated nanoarchitectures was demonstrated through gold nanoparticle capture, with a thiol-terminated nanopatterned silicon surface.

摘要

描述了一种基于印章的有机单层纳米级图案化技术,称为催化印章光刻。通过使用自组装嵌段共聚物,在聚二甲基硅氧烷表面用催化钯纳米颗粒(NPs)进行图案化。使用这种催化印章,在H端接的Si(111)或Si(100)表面上对末端烯烃/炔烃进行催化硅氢化反应,以创建有机单层的纳米级图案。由于反应仅在图案化的钯纳米颗粒下方发生(局部催化),即使在这种小于100纳米的尺度下,图案形成也不太容易受到油墨扩散和印章变形的影响。可以使用一系列不同的分子油墨来制备具有不同化学功能的单层图案,并且印章可以多次重复使用。通过用硫醇端接的纳米图案化硅表面捕获金纳米颗粒,证明了这种化学图案化表面作为更复杂纳米结构基础的潜在用途。

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