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通过催化压印光刻技术对有机单层的纳米级图案化:范围和限制。

Nanoscale patterning of organic monolayers by catalytic stamp lithography: scope and limitations.

机构信息

Department of Chemistry, University of Alberta, and the National Institute for Nanotechnology, National Research Council, Edmonton, Alberta, T6G 2G2, Canada.

出版信息

ACS Appl Mater Interfaces. 2009 Dec;1(12):2711-20. doi: 10.1021/am900602m.

Abstract

Developing a method to pattern organic molecules, particularly on the sub-100-nm scale, is of wide interest in current nanoscience for a broad range of technological applications. Because of the efficiency and simplicity of soft lithography, here we describe in detail the process for synthesizing and applying catalytic stamp lithography, a process that can easily produce sub-100-nm patterns on surfaces; in this work, the approach is demonstrated on silicon. Catalytic stamps were fabricated through a two-step procedure in which the nanoscale pattern of catalysts is produced via a self-assembled block-copolymer-templated synthesis of metallic nanostructures on SiO(x)/Si supports, followed by the production of the poly(dimethylsiloxane) (PDMS) stamp on top of the as-patterned metals. Simply peeling off the as-formed PDMS stamp removes the metallic nanostructures, leading to the functional stamp. Two different patterns, pseudohexagonal and linear Pt nanoarrays, were produced from a single block copolymer, PS(125000)-b-P2VP(58500), by controlling the morphology of thin-film templates through tetrahydrofuran vapor annealing. When terminal alkenes, alkynes, or aldehydes with different functionalities were used as molecular inks, these Pt nanopatterns on catalytic stamps were translated into corresponding molecular arrays on Si(111)-H and Si(100)-H(x) surfaces because catalytic hydrosilylation took place exclusively underneath patterned Pt nanostructures. With this straightforward approach, the resolution limit of conventional microcontact printing (approximately 100 nm) could be downsized to a sub-20-nm scale, while maintaining the advantages of stamp-based patterning (i.e., large-area, high-throughput capabilities and low cost).

摘要

开发一种在亚 100nm 尺度上对有机分子进行图案化的方法,是当前纳米科学中广泛关注的问题,因为它在广泛的技术应用中有很大的潜力。由于软光刻的高效性和简单性,我们在这里详细描述了合成和应用催化印章光刻的过程,该过程可以很容易地在表面上产生亚 100nm 的图案;在这项工作中,该方法在硅衬底上得到了验证。催化印章是通过两步法制备的,其中纳米级催化剂图案是通过在 SiO(x)/Si 衬底上自组装的嵌段共聚物模板合成金属纳米结构来产生的,然后在图案化的金属上制备聚二甲基硅氧烷(PDMS)印章。简单地剥离形成的 PDMS 印章即可去除金属纳米结构,从而得到功能印章。通过控制薄膜模板的形态,通过四氢呋喃蒸气退火,从单个嵌段共聚物 PS(125000)-b-P2VP(58500)中制备出两种不同的图案,即拟六边形和线性 Pt 纳米阵列。当具有不同功能的末端烯烃、炔烃或醛用作分子墨水时,这些催化印章上的 Pt 纳米图案被转化为 Si(111)-H 和 Si(100)-H(x)表面上相应的分子阵列,因为只有在图案化的 Pt 纳米结构下才会发生催化氢化硅烷化反应。通过这种简单的方法,可以将传统微接触印刷的分辨率限制(约 100nm)缩小到亚 20nm 尺度,同时保持基于印章的图案化的优势(即大面积、高通量能力和低成本)。

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