Koesdjojo Myra T, Koch Corey R, Remcho Vincent T
Department of Chemistry, Oregon State University, Corvallis, Oregon 97331, USA.
Anal Chem. 2009 Feb 15;81(4):1652-9. doi: 10.1021/ac802450u.
Novel means of fabricating polymeric microfluidic devices are presented. An SU-8 master is applied in two-stage embossing, followed by vaporized organic solvent bonding. The primary master is created by standard photolithography; the inexpensive SU-8 primary master is used in a two-stage process to generate microfeatures in hard polymers. A vaporized solvent bonding technique that readily produces complete microfluidic chips, without the need of a sacrificial layer to prevent channel deformation, was used to form complete multilayer microfluidic devices. This technique provides a more direct method to generate hard polymer microfluidic chips than classical techniques and therefore is highly amenable to rapid prototyping. The technique lends itself readily to many polymers, facilitating device production for a variety of applications, even permitting hybrid polymer chips, and provides a rapid, cost-effective, simple, and versatile approach to the production of polymer-based microdevices. The fabrication technique was tested to build microchips to perform several analyses, including chromatographic separations and a quantitative indicator assay. High separation efficiencies of 10,000-45,000 plates/m were obtained using the fabricated liquid chromatography (LC) microchip. The fabrication method was also tested in building a passive micromixer that contained high-density microfeatures and required three polymer layers. A glycine assay using o-phthaldialdehyde (OPA) was performed in the micromixer. With glycine concentrations ranging from 0.0 to 2.6 microM, a linear calibration plot was obtained with a detection limit of 0.032 microM.
介绍了制造聚合物微流控器件的新方法。采用SU-8母版进行两步压花，随后进行汽化有机溶剂键合。初级母版通过标准光刻技术制作；廉价的SU-8初级母版用于两步工艺，以在硬质聚合物中生成微特征。一种汽化溶剂键合技术可轻松生产完整的微流控芯片，无需牺牲层来防止通道变形，该技术用于形成完整的多层微流控器件。与传统技术相比，该技术提供了一种更直接的方法来制造硬质聚合物微流控芯片，因此非常适合快速成型。该技术易于应用于多种聚合物，便于生产用于各种应用的器件，甚至允许制造混合聚合物芯片，并为基于聚合物的微器件生产提供了一种快速、经济高效、简单且通用的方法。对该制造技术进行了测试，以构建用于进行多种分析的微芯片，包括色谱分离和定量指标测定。使用制造的液相色谱（LC）微芯片获得了10,000 - 45,000塔板/米的高分离效率。还对该制造方法进行了测试，以构建一个包含高密度微特征且需要三层聚合物的被动微混合器。在微混合器中使用邻苯二甲醛（OPA）进行了甘氨酸测定。甘氨酸浓度范围为0.0至2.6 microM时，获得了线性校准曲线，检测限为0.032 microM。
