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使用离子切片机制备薄膜的先进离子铣削方法:应用于从金刚石对顶砧槽中回收的样品。

The advanced ion-milling method for preparation of thin film using ion slicer: application to a sample recovered from diamond-anvil cell.

作者信息

Tateno Shigehiko, Sinmyo Ryosuke, Hirose Kei, Nishioka Hideo

机构信息

Department of Earth and Planetary Sciences, Tokyo Institute of Technology, Meguro, Tokyo 152-8551, Japan.

出版信息

Rev Sci Instrum. 2009 Jan;80(1):013901. doi: 10.1063/1.3058760.

Abstract

The advanced argon ion-milling technique using a new instrument called ion slicer was newly developed for preparation of thin foil. Compared to the conventional ion-milling methods, this technique facilitates very wide area to be homogeneously thinned by rocking the ion beam source with low angle and the specimen during milling. Here we applied this technique to a sample recovered from a laser-heated diamond-anvil cell (DAC). We obtained the thin film of almost entire cross section of the DAC sample along the compression axis, which possesses of approximately (10x50) microm(2). The laser-heated sample is often heterogeneous due to a large temperature gradient. However the chemical analyses are obtained from the whole hot spot under the transmission electron microscope by preparing the thin foil using the ion slicer.

摘要

一种使用名为离子切片机的新仪器的先进氩离子研磨技术被新开发用于制备薄箔。与传统的离子研磨方法相比,该技术通过在研磨过程中以低角度摇动离子束源和样品,便于非常大面积的区域均匀变薄。在这里,我们将该技术应用于从激光加热金刚石砧室(DAC)回收的样品。我们沿着压缩轴获得了DAC样品几乎整个横截面的薄膜,其尺寸约为(10×50)微米²。由于大的温度梯度,激光加热的样品通常是不均匀的。然而,通过使用离子切片机制备薄箔,可以在透射电子显微镜下从整个热点获得化学分析结果。

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