Graphical template software for accurate micromanipulation in a scanning electron microscope.

Micromanipulation techniques in a scanning electron microscope (SEM) have been utilized for assembling micrometer-sized structures. The precision of the assembled microstructures has been limited by the poor accuracy of the SEM image. We have developed a software to assist the operator in the accurate assembly of microstructures in a SEM, in which computer-generated outlines of the target structure [graphical templates (GTs)] are superimposed on the monitor. The displayed GTs are distorted on the basis of the image properties of the SEM evaluated in advance. As a consequence, the operator can construct microstructures with a high precision only by maneuvering the manipulator so that the outline of each object perfectly overlaps the GT without any alteration of the electron optics or circuits for improving the image accuracy.