Kim Sang-Jin, Ono Takahito, Esashi Masayoshi
Graduate School of Engineering, Tohoku University, 6-6-01 Aza Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan.
Rev Sci Instrum. 2009 Mar;80(3):033703. doi: 10.1063/1.3095680.
Thermal detection based on the thermal shift of the resonant frequency of a bimetal resonator (Al/Si) is presented and demonstrated. The bimetal oscillator with a tip is fabricated at the end of a commercial silicon cantilever. The bimetal oscillator and the silicon cantilever have a resonance frequency of 441 and 91 kHz, respectively, and the measured temperature coefficients of the resonant frequency are -127x10(-6)/K and -115x10(-6)/K, respectively. It is demonstrated that self-oscillated resonant frequency of the bimetal oscillator changes in response to heat from a microheat source. Simultaneous measurements of topography and temperature profile with the temperature resolution of 0.12 K on a glass substrate heated using a thin chromium film microheater are successfully demonstrated. These results show potential abilities of the mechanical resonant thermal sensor.
本文提出并展示了基于双金属谐振器（铝/硅）谐振频率热偏移的热检测方法。在商用硅悬臂梁的末端制作了带有尖端的双金属振荡器。双金属振荡器和硅悬臂梁的谐振频率分别为441 kHz和91 kHz，测得的谐振频率温度系数分别为-127×10⁻⁶/K和-115×10⁻⁶/K。结果表明，双金属振荡器的自激振荡谐振频率会因微热源产生的热量而发生变化。利用铬薄膜微加热器加热玻璃基板时，成功实现了地形和温度分布的同时测量，温度分辨率为0.12 K。这些结果显示了机械谐振热传感器的潜在能力。
