Teva J, Abadal G, Torres F, Verd J, Pérez-Murano F, Barniol N
Dept. d'Enginyeria Electrònica, Universitat Autònoma de Barcelona, Bellaterra E- 08193, Spain.
Ultramicroscopy. 2006 Jun-Jul;106(8-9):800-7. doi: 10.1016/j.ultramic.2005.12.016. Epub 2006 Apr 18.
A microcantilever based platform for mass detection in the femtogram range has been integrated in the doped top silicon layer of a SOI substrate. The on-plane fundamental resonance mode of the cantilever is excited electrostatically and detected capacitively by means of two parallel placed electrodes in a two port configuration. An electromechanical model of the cantilever-electrodes transducer and its implementation in a SPICE environment are presented. The model takes into account non-linearities from variable cantilever-electrode gap, fringing field contributions and real deflection shape of the cantilever for the calculation of the driving electrostatic force. A fitting of the model to the measured S(21) transmitted power frequency response is performed to extract the characteristic sensor parameters as Young modulus, Q factor, electrical parasitics and mass responsivity.
一种用于飞克范围内质量检测的基于微悬臂梁的平台已集成在绝缘体上硅（SOI）衬底的掺杂顶部硅层中。悬臂梁的平面内基模通过静电激发，并通过两个端口配置中两个平行放置的电极进行电容检测。本文介绍了悬臂梁 - 电极换能器的机电模型及其在SPICE环境中的实现。该模型在计算驱动静电力时考虑了可变悬臂梁 - 电极间隙的非线性、边缘场贡献以及悬臂梁的实际挠曲形状。通过将模型与测量的S(21)传输功率频率响应进行拟合，以提取特征传感器参数，如杨氏模量、品质因数、电寄生参数和质量响应率。
