Chueh Yu-Lun, Ford Alexandra C, Ho Johnny C, Jacobson Zachery A, Fan Zhiyong, Chen Chih-Yen, Chou Li-Jen, Javey Ali
Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, California 94720, USA.
Nano Lett. 2008 Dec;8(12):4528-33. doi: 10.1021/nl802681x.
The formation of crystalline NixInAs and NixInAs/InAs/NixInAs heterostructure nanowires by the solid source reaction of InAs nanowires with Ni is reported for the first time. The fundamental kinetics of the Ni/InAs alloying reaction is explored, with the Ni diffusion reported as the rate determining step. The diffusivity of Ni is independent of the nanowire diameter, with an extracted diffusion activation energy of approximately 1 eV/atom. The metallic NixInAs exhibits a modest resistivity of approximately 167 micro omega x cm for diameters >30 nm, with the resistivity increasing as the nanowire diameter is further reduced due to the enhanced surface scattering. The alloying reaction readily enables the fabrication of NixInAs/InAs/NixInAs heterostructure nanowire transistors for which the length of the InAs segment (i.e., channel length) is controllably reduced through subsequent thermal annealing steps, therefore enabling a systematic study of electrical properties as a function of channel length. From the electrical transport studies, an electron mean free path on the order of a few hundred nm is observed for InAs NWs with a unit length normalized, ON-state resistance of approximately 7.5 k omega/microm. This approach presents a route toward the fabrication for high performance InAs nanowire transistors with ohmic nanoscale contacts and low parasitic capacitances and resistances.
首次报道了通过 InAs 纳米线与 Ni 的固体源反应形成晶体 NixInAs 和 NixInAs/InAs/NixInAs 异质结构纳米线。探索了 Ni/InAs 合金化反应的基本动力学,报道 Ni 扩散为速率决定步骤。Ni 的扩散率与纳米线直径无关,提取的扩散活化能约为 1 eV/原子。对于直径 >30 nm 的金属 NixInAs,其电阻率约为 167 微欧厘米,随着纳米线直径进一步减小,由于表面散射增强,电阻率会增加。合金化反应能够轻松制造 NixInAs/InAs/NixInAs 异质结构纳米线晶体管,通过后续的热退火步骤,InAs 段的长度(即沟道长度)可控制地减小,从而能够系统地研究电学性质与沟道长度的关系。从电输运研究中,对于单位长度归一化、导通态电阻约为 7.5 k 欧/微米的 InAs 纳米线,观察到电子平均自由程约为几百纳米。这种方法为制造具有欧姆纳米级接触以及低寄生电容和电阻的高性能 InAs 纳米线晶体管提供了一条途径。