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用飞秒激光脉冲对固体靶进行亚衍射极限结构化处理。

Sub-diffraction limited structuring of solid targets with femtosecond laser pulses.

作者信息

Korte F, Adams S, Egbert A, Fallnich C, Ostendorf A, Nolte S, Will M, Ruske J P, Chichkov B, Tuennermann A

出版信息

Opt Express. 2000 Jul 17;7(2):41-9. doi: 10.1364/oe.7.000041.

DOI:10.1364/oe.7.000041
PMID:19404368
Abstract

Possibilities to produce sub-diffraction limited structures in thin metal films and bulk dielectric materials using femtosecond laser pulses are investigated. The physics of ultrashort pulse laser ablation of solids is outlined. Results on the fabrication of sub-micrometer structures in 100-200 nm chrome-coated surfaces by direct ablative writing are reported. Polarization maintaining optical waveguides produced by femtosecond laser pulses inside crystalline quartz are demonstrated.

摘要

研究了使用飞秒激光脉冲在薄金属膜和块状介电材料中产生亚衍射极限结构的可能性。概述了固体超短脉冲激光烧蚀的物理过程。报道了通过直接烧蚀写入在100 - 200纳米镀铬表面制造亚微米结构的结果。展示了飞秒激光脉冲在晶体石英内部产生的保偏光波导。

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