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硅上应变锗岛的全局刻面行为

Global faceting behavior of strained Ge islands on Si.

作者信息

Robinson Jeremy T, Rastelli Armando, Schmidt Oliver, Dubon Oscar D

机构信息

US Naval Research Laboratory, Washington, DC 20375, USA.

出版信息

Nanotechnology. 2009 Feb 25;20(8):085708. doi: 10.1088/0957-4484/20/8/085708. Epub 2009 Feb 3.

Abstract

The evolution of crystallographic facets of strained heteroepitaxial Ge islands on Si is investigated. Islands growing on Si(001), (111), (110) and (113) are bound by an equilibrium set of facets that includes only shared stable surfaces between bulk Si and Ge--{105}, {113}, {15 3 23} and {111}. The formation of a stereographic map from these indices facilitates the prediction of Ge faceted-island shapes on any Si substrate at different stages of growth. The analysis presented here can be applied to other heteroepitaxial islanding systems where a finite set of shared equilibrium facets exists for the bulk starting materials.

摘要

研究了硅上应变异质外延锗岛的晶体学小面的演化。在Si(001)、(111)、(110)和(113)上生长的岛由一组平衡小面界定,该平衡小面仅包括块状硅和锗之间的共享稳定表面——{105}、{113}、{15 3 23}和{111}。根据这些指数形成的极射赤面投影图有助于预测在生长的不同阶段任何硅衬底上锗多面岛的形状。本文提出的分析可应用于其他异质外延岛状系统,其中块状起始材料存在一组有限的共享平衡小面。

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