He M, Yuan X-C, Ngo N, Bu J, Tao S
Opt Express. 2003 Jul 14;11(14):1621-7. doi: 10.1364/oe.11.001621.
In this paper, we present a novel reflow technique for the fabrication of an elliptical microlens array in sol-gel glass. The fabricated refractive microlens array has a very smooth surface, and structural and dimensional conformity with the designed parameters. It is shown that the microlens array can provide high coupling efficiency of a laser diode to a single mode fiber, and relax the lateral and axial misalignment tolerance. The microlens coupling technique has the advantages of low coupling loss, large misalignment tolerances, and small package volume.
在本文中,我们提出了一种用于在溶胶-凝胶玻璃中制造椭圆形微透镜阵列的新型回流技术。所制造的折射微透镜阵列具有非常光滑的表面,并且在结构和尺寸上与设计参数相符。结果表明,该微透镜阵列能够为激光二极管与单模光纤提供高耦合效率,并放宽横向和轴向对准公差。微透镜耦合技术具有耦合损耗低、对准公差大以及封装体积小的优点。