Tripathi A, Chronis N
Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI, USA.
J Micromech Microeng. 2011 Sep 21;21(10). doi: 10.1088/0960-1317/21/10/105024.
We present a high-numerical aperture, doublet microlens array for imaging micron-sized objects. The proposed doublet architecture consists of glass microspheres trapped on a predefined array of silicon microholes and covered with a thin polymer layer. A standard silicon microfabrication process and a novel fluidic assembly technique were combined to obtain an array of 56 μm diameter microlenses with a numerical aperture of ~0.5. Using such an array, we demonstrated brightfield and fluorescent image formation of objects directly on a CCD sensor without the use of intermediate lenses. The proposed technology is a significant advancement toward the unmet need of inexpensive, miniaturized optical modules which can be further integrated with lab-on-chip microfluidic devices and photonic chips for a variety of high-end imaging/detection applications.
我们展示了一种用于对微米级物体进行成像的高数值孔径双合微透镜阵列。所提出的双合结构由捕获在预定义硅微孔阵列上并覆盖有薄聚合物层的玻璃微球组成。将标准的硅微加工工艺与一种新颖的流体组装技术相结合，以获得直径为56μm、数值孔径约为0.5的微透镜阵列。使用这样的阵列，我们展示了无需使用中间透镜即可直接在电荷耦合器件（CCD）传感器上形成物体的明场和荧光图像。所提出的技术朝着满足对廉价、小型化光学模块的未满足需求迈出了重要一步，这种光学模块可进一步与芯片实验室微流体装置和光子芯片集成，用于各种高端成像/检测应用。
