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Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching.

作者信息

Ruan Yinlan, Li Weitang, Jarvis Ruth, Madsen Nathan, Rode Andrei, Luther-Davies Barry

出版信息

Opt Express. 2004 Oct 18;12(21):5140-5. doi: 10.1364/opex.12.005140.

DOI:10.1364/opex.12.005140
PMID:19484069
Abstract

We report the fabrication and characterization of rib chalcogenide waveguides produced by dry etching with CF4 and O2. The high index contrast waveguides (Deltan ~1) show a minimum propagation loss of 0.25 dB/cm. The high refractive nonlinearity of 100 times silica in As2S3 allowed observation of a pi phase shift due to self-phase modulation of an 8 ps duration 1573 nm pulse in a 5 cm long waveguide.

摘要

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